JPH029253B2 - - Google Patents
Info
- Publication number
- JPH029253B2 JPH029253B2 JP15893484A JP15893484A JPH029253B2 JP H029253 B2 JPH029253 B2 JP H029253B2 JP 15893484 A JP15893484 A JP 15893484A JP 15893484 A JP15893484 A JP 15893484A JP H029253 B2 JPH029253 B2 JP H029253B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- small
- frame material
- frame
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 21
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15893484A JPS6138614A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15893484A JPS6138614A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6138614A JPS6138614A (ja) | 1986-02-24 |
JPH029253B2 true JPH029253B2 (en]) | 1990-03-01 |
Family
ID=15682528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15893484A Granted JPS6138614A (ja) | 1984-07-31 | 1984-07-31 | 全面層流型クリ−ンル−ムの天井吊設フイルタ−システムに於けるフイルタ−フレ−ムから清浄空気を流す装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6138614A (en]) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6297427U (en]) * | 1985-12-10 | 1987-06-22 | ||
JPH0633300Y2 (ja) * | 1986-10-02 | 1994-08-31 | 株式会社竹中工務店 | 全面層流クリ−ンル−ム |
JPH03284730A (ja) * | 1990-03-30 | 1991-12-16 | Hitachi Chem Co Ltd | 電気泳動表示装置用表示パネルの製造法 |
JP2524214Y2 (ja) * | 1990-08-13 | 1997-01-29 | 株式会社大氣社 | クリーンルーム設備 |
GB9421303D0 (en) * | 1994-10-22 | 1994-12-07 | Howorth Airtech Ltd | Clean air system |
-
1984
- 1984-07-31 JP JP15893484A patent/JPS6138614A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6138614A (ja) | 1986-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |